10 Patents
- US124986342025System and Method for Generating Control Values for Overlay Control of an Imprint Tool
Canon Kabushiki Kaisha
0 cites - US124630812025Apparatus Including a Bonding Head and a Method of Using the Same
CANON KABUSHIKI KAISHA
0 cites - US123668002025Method for Improving Accuracy of Imprint Force Application in Imprint Lithography
CANON KABUSHIKI KAISHA
0 cites - US119947972024System and Method for Shaping a Film with a Scaled Calibration Measurement Parameter
CANON KABUSHIKI KAISHA
0 cites - US117768402023Superstrate Chuck, Method of Use, and Method of Manufacturing an Article
Canon Kabushiki Kaisha
0 cites - US116565462023Exposure Apparatus for Uniform Light Intensity and Methods of Using the Same
CANON KABUSHIKI KAISHA
0 cites - US116146932023Method of Determining the Initial Contact Point for Partial Fields and Method of Shaping a Surface
Canon Kabushiki Kaisha
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