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Marinus Johannes Maria Van Dam
Venlo
NL
4 patents
4 Patents
US12591179
2026
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US12460971
2025
Wavelength Selection Module, Illumination System and Metrology System
ASML Netherlands B.V.
0 cites
US11940739
2024
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US11549806
2023
Metrology Apparatus
ASML Netherland B.V.
0 cites