2 Patents
- US123162952025Method of Fabricating Layers of Single-crystal Material
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
0 cites - US117058802023Process for Producing a Micro-electro-mechanical System from a Transferred Piezoelectric or Ferroelectric Layer
ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
0 cites