20 Patents
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- US124227592025Component for Use in a Lithographic Apparatus, Method of Protecting a Component and Method of Protecting Tables in a Lithographic Apparatus
ASML NETHERLANDS B.V.
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- US123325702025Lithographic System Provided with a Deflection Apparatus for Changing a Trajectory of Particulate Debris
ASML Netherlands B.V.
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- US122355922025Object Holder, Electrostatic Sheet and Method for Making an Electrostatic Sheet
ASML NETHERLANDS B.V.
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- US121587062024Lithographic Apparatus and Method with Improved Contaminant Particle Capture
ASML NETHERLANDS B.V.
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- US120011492024Component for Use in a Lithographic Apparatus, Method of Protecting a Component and Method of Protecting Tables in a Lithographic Apparatus
ASML Netherlands B.V.
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- US119069072024Apparatus and Method for Determining a Condition Associated with a Pellicle
ASML HOLDING N.V.
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