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Marcel Trimpl
San Jose, CA
US
2 patents
3 Patents
US12484316
2025
CVD Boron Uniformity Overcoming Loading Effects
KLA Corporation
0 cites
US11699607
2023
Segmented Multi-channel, Backside Illuminated, Solid State Detector with a Through-hole for Detecting Secondary and Backscattered Electrons
KLA Corporation
0 cites
US11610757
2023
Sensor Module for Scanning Electron Microscopy Applications
KLA Corporation
0 cites