Marcel Kollberg

3 Patents

• US121105912024

  Susceptor Arrangement of a CVD Reactor

  AIXTRON SE

  0 cites
• US120984622024

  Method for Producing a Component Part of a CVD Reactor

  AIXTRON SE

  0 cites
• US117027402023

  Closure Element for Closing a Loading Opening of an Inner Housing of a CVD Reactor

  AIXTRON SE

  0 cites