Patents/Inventors

Marcel Brill

LudwigshafenDE1 patent

2 Patents

US121461252024
Use of Compositions Comprising a Solvent Mixture for Avoiding Pattern Collapse When Treating Patterned Materials with Line-space Dimensions of 50 Nm or Below
BASF SE
0 cites
US119706472024
Composition, Its Use and a Process for Selectively Etching Silicon-germanium Material
BASF SE
0 cites