Patents/Inventors

Marc Smits

PijnackerNL5 patents

6 Patents

US126092652026
Actuator Arrangement and Electron-optical Column
ASML Netherlands B.V.
0 cites
US124760752025
Stack Alignment Techniques
ASML Netherlands B.V.
0 cites
US122020192025
Method and System for the Removal And/or Avoidance of Contamination in Charged Particle Beam Systems
ASML Netherlands B.V.
0 cites
US119616982024
Replaceable Module for a Charged Particle Apparatus
ASML Netherlands B.V.
0 cites
US117383762023
Method and System for the Removal And/or Avoidance of Contamination in Charged Particle Beam Systems
ASML Netherlands, B.V.
0 cites
US115990282023
Methods and Systems for Clamping a Substrate
ASML Netherlands B.V.
0 cites