Marc Hauptmann

5 Patents

• US122769192025

  Method for Controlling a Semiconductor Manufacturing Process

  ASML NETHERLANDS B.V.

  0 cites
• US120859132024

  Method for Generating a Control Scheme and Device Manufacturing Method

  ASML NETHERLANDS B.V.

  0 cites
• US120449812024

  Method and Apparatus for Optimization of Lithographic Process

  ASML NETHERLANDS B.V.

  0 cites
• US117823492023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US115927532023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites