Patents/Inventors

Manuel Sohn

UlmDE9 patents

8 Patents

US125352732026
Workpiece Processing Apparatus with Thermal Processing Systems
Mattson Technology, Inc.
0 cites
US124420782025
Workpiece Processing Apparatus with Gas Showerhead Assembly
Mattson Technology, Inc.
0 cites
US123621942025
Rapid Thermal Processing System with Cooling System
Matson Technology, Inc.
0 cites
US123523062025
Workpiece Support for a Thermal Processing System
Mattson Technology, Inc.
0 cites
US123082092025
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
Mattson Technology, Inc.
0 cites
US121762412024
Support Structure for Thermal Processing Systems
Matson Technology, Inc.
0 cites
US120681772024
Rapid Thermal Processing System with Cooling System
Mattson Technology, Inc.
0 cites
US119553152024
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
Mattson Technology, Inc.
0 cites