Manjunath Subbanna

6 Patents

• US125842182026

  Plate Assemblies, Process Kits, and Processing Chambers for Semiconductor Manufacturing

  APPLIED MATERIALS, Inc.

  0 cites
• US124671442025

  Methods of Correlating Zones of Processing Chambers, and Related Systems and Methods

  APPLIED MATERIALS, Inc.

  0 cites
• US124287312025

  Flow Guide Structures and Heat Shield Structures, and Related Methods, for Deposition Uniformity and Process Adjustability

  APPLIED MATERIALS, Inc.

  0 cites
• US120917492024

  Method for Epitaxially Depositing a Material on a Substrate by Flowing a Process Gas Across the Substrate from an Upper Gas Inlet to an Upper Gas Outlet and Flowing a Purge Gas from a Lower Gas Inlet to a Lower Gas Outlet

  Applied Materials, Inc.

  0 cites
• US120606512024

  Chamber Architecture for Epitaxial Deposition and Advanced Epitaxial Film Applications

  Applied Materials, Inc.

  0 cites
• US120183722024

  Gas Injector for Epitaxy and CVD Chamber

  Applied Materials, Inc.

  0 cites