5 Patents
- US122042462025Metal Oxide Resist Patterning with Electrical Field Guided Post-exposure Bake
Applied Materials, Inc.
0 cites - 0 cites
- US119142992024Lithography Process Window Enhancement for Photoresist Patterning
Applied Materials, Inc.
0 cites - US118801372024Film Structure for Electric Field Guided Photoresist Patterning Process
Applied Materials, Inc.
0 cites - US116095052023Apparatus and Methods for Verification and Re-use of Process Fluids
Applied Materials, Inc.
0 cites