14 Patents
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- US123052782025Method of Reducing Titanium Nitride Etching During Tungsten Film Formation
Applied Materials, Inc.
0 cites - US123052842025Apparatus and Methods for Fine Planar Non-uniformity Improvement
Applied Materials, Inc.
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- US120625452024Fluorine-free Tungsten ALD for Dielectric Selectivity Improvement
Applied Materials, Inc.
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- US118878562024Enhanced Spatial ALD of Metals Through Controlled Precursor Mixing
APPLIED MATERIALS, Inc.
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