Patents/Inventors

Manato Furusawa

Ota-kuJP4 patents

4 Patents

USD11198292026
Seal for Chemical Mechanical Polishing Device
EBARA CORPORATION
0 cites
USD11023982025
Seal for Chemical Mechanical Polishing Device
EBARA CORPORATION
0 cites
US124035072025
Transfer Apparatus, Cleaning Module, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US117017502023
Top Ring for Holding a Substrate and Substrate Processing Apparatus
EBARA CORPORATION
0 cites