Manao Hoshina

5 Patents

• US124068742025

  Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, and Substrate Processing Method

  EBARA CORPORATION

  0 cites
• US120027042024

  Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, and Substrate Processing Method

  EBARA CORPORATION

  0 cites
• US118656652024

  Polishing Apparatus

  EBARA CORPORATION

  0 cites
• US116971842023

  Substrate Processing Apparatus and Substrate Processing Method

  EBARA CORPORATION

  0 cites
• US116389802023

  Laminated Membrane, Substrate Holder Including Laminated Membrane, and Substrate Processing Apparatus

  EBARA CORPORATION

  0 cites