Patents/Inventors

Manabu Okutani

KyotoJP4 patents

4 Patents

US120428132024
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US120464652024
Substrate Treatment Method and Substrate Treatment Apparatus
SCREEN HOLDINGS CO., Ltd.
0 cites
US119011732024
Substrate Processing Method
SCREEN Holdings Co., Ltd.
0 cites
US116768342023
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites