Patents/Inventors

Manabu Oie

MiyagiJP3 patents

3 Patents

US123004672025
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118994762024
Method and Apparatus for Measuring Gas Flow
TOKYO ELECTRON LIMITED
0 cites
US117422282023
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites