7 Patents
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- US123621552025Substrate Processing Apparatus, Temperature Control Method of Substrate Processing Apparatus, and Program of Control Device for Controlling Substrate Processing Apparatus
Tokyo Electron Limited
0 cites - US122117062025Substrate Processing Device and Method of Manufacturing Substrate Processing Device
Tokyo Electron Limited
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- US118674582024Temperature Sensor, Temperature Measuring Device, and Temperature Measuring Method
Tokyo Electron Limited
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- US116055472023Temperature Measuring Mechanism, Temperature Measuring Method, and Stage Device
TOKYO ELECTRON LIMITED
0 cites