Patents/Inventors

Manabu Honma

OshuJP9 patents

10 Patents

US125710982026
Apparatus and Method for Performing Film Forming Process on Substrates in Substrate Processing Chambers
Tokyo Electron Limited
0 cites
US123851322025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US123851362025
Apparatus for Performing Film Forming Process on Substrate, and Method of Exhausting Processing Gas from Apparatus for Performing Film Forming Process on Substrate
Tokyo Electron Limited
0 cites
US123593022025
Film Deposition Apparatus and Film Deposition Method
Tokyo Electron Limited
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US122975362025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US122472872025
Apparatus for Performing Film Forming Process on Substrate and Method of Using Vacuum Chuck Mechanism Provided in the Apparatus
Tokyo Electron Limited
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US120917532024
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US118697982024
Deposition Apparatus
Tokyo Electron Limited
0 cites
US117027472023
Rotation Driving Mechanism and Rotation Driving Method, and Substrate Processing Apparatus and Substrate Processing Method Using Same
Tokyo Electron Limited
0 cites
US116742252023
Substrate Processing Apparatus
TOKYO ELECTRON LIMTED
0 cites