Patents/Inventors

Mana Tanabe

TokyoJP3 patents

3 Patents

US125326962026
Substrate Processing Method and Substrate Processing Device
Kioxia Corporation
0 cites
US117768232023
Substrate Processing Method and Substrate Processing Apparatus
Kioxia Corporation
0 cites
US116825662023
Processing Apparatus for Processing Substrates of Different Types
Kioxia Corporation
0 cites