Patents/Inventors

Mamoru Kosakai

TokyoJP2 patents

3 Patents

US118878772024
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US116642612023
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US115519622023
Ceramic Substrate and Susceptor
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites