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Inventors
Makoto Satake
Tokyo
JP
9 patents
4 Patents
US12620556
2026
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US12581881
2026
Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US12347693
2025
Plasma Processing Method and Manufacturing Method of Semiconductor Device
Hitachi High-tech Corporation
0 cites
US11790199
2023
Printing Apparatus, Control Method, and Storage Medium
CANON KABUSHIKI KAISHA
0 cites