Patents/Inventors

Makoto Kashiwagi

Ota-kuJP15 patents

12 Patents

USD11198292026
Seal for Chemical Mechanical Polishing Device
EBARA CORPORATION
0 cites
USD11023982025
Seal for Chemical Mechanical Polishing Device
EBARA CORPORATION
0 cites
US124068742025
Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, and Substrate Processing Method
EBARA CORPORATION
0 cites
US123775162025
Polishing Head and Polishing Apparatus
EBARA CORPORATION
0 cites
US122371942025
Substrate Transporter and Substrate Processing Apparatus Including Substrate Transporter
EBARA CORPORATION
0 cites
US120027042024
Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, and Substrate Processing Method
EBARA CORPORATION
0 cites
US118656652024
Polishing Apparatus
EBARA CORPORATION
0 cites
US118584872024
Brake Control Apparatus and Method for Detecting Abnormality in Brake Control Apparatus
Hitachi Astemo, Ltd.
0 cites
US118043982023
Workpiece Supporting Apparatus and Workpiece Supporting Method
EBARA CORPORATION
0 cites
US117017502023
Top Ring for Holding a Substrate and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US116971842023
Substrate Processing Apparatus and Substrate Processing Method
EBARA CORPORATION
0 cites
US116389802023
Laminated Membrane, Substrate Holder Including Laminated Membrane, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites