Patents/Inventors

Makoto Fukushima

TokyoJP9 patents

10 Patents

US123810892025
Information Processing System, Information Processing Method, Program, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US122305292025
Substrate Holding Apparatus, Substrate Suction Determination Method, Substrate Polishing Apparatus, Substrate Polishing Method, Method of Removing Liquid from Upper Surface of Wafer to Be Polished, Elastic Film for Pressing Wafer Against Polishing Pad, Substrate Release Method, and Constant Amount Gas Supply Apparatus
EBARA CORPORATION
0 cites
US121285232024
Polishing Apparatus
EBARA CORPORATION
0 cites
US120681892024
Elastic Membrane, Substrate Holding Device, and Polishing Apparatus
EBARA CORPORATION
0 cites
US119698582024
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US119581632024
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane
EBARA CORPORATION
0 cites
US117453062023
Polishing Apparatus and Method of Controlling Inclination of Stationary Ring
EBARA CORPORATION
0 cites
US117312352023
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
USD09819692023
Elastic Membrane for Semiconductor Wafer Polishing Apparatus
EBARA CORPORATION
0 cites
US115481132023
Method and Apparatus for Polishing a Substrate
EBARA CORPORATION
0 cites