7 Patents
- US122304692025Apparatus for and Method of Local Control of a Charged Particle Beam
ASML Netherlands B.V.
0 cites - US121835402024Systems and Methods of Determining Aberrations in Images Obtained by a Charged-particle Beam Tool
ASML Netherlands B.V.
0 cites - 0 cites
- US119617002024Systems and Methods for Image Enhancement for a Multi-beam Charged-particle Inspection System
ASML Netherlands B.V.
0 cites - 0 cites
- US118813742024Apparatus for and Method of Controlling an Energy Spread of a Charged-particle Beam
ASML Netherlands B.V.
0 cites - 0 cites