Patents/Inventors

Mahdiar Valefi

EindhovenNL3 patents

3 Patents

USRE0507852026
Lithographic Apparatus Substrate Table and Method of Loading a Substrate
ASML NETHERLANDS B.V.
0 cites
US120726202024
Method of Manufacturing a Membrane Assembly
ASML NETHERLANDS B.V.
0 cites
US115673992023
EUV Pellicles
ASML Netherlands B.V.
0 cites