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Inventors
Madhur Sachan
Belmont, CA
US
15 patents
9 Patents
US12618153
2026
Multiple-metal-containing Metal-oxo Photoresist Films by CVD and ALD Methods
Applied Materials, Inc.
0 cites
US12416863
2025
Dry Develop Process of Photoresist
Applied Materials, Inc.
0 cites
US12300491
2025
Deposition of Semiconductor Integration Films
Applied Materials, Inc.
0 cites
US12068170
2024
Vapor Phase Thermal Etch Solutions for Metal Oxo Photoresists
Applied Materials, Inc.
0 cites
US12033866
2024
Vapor Phase Thermal Etch Solutions for Metal Oxo Photoresists
Applied Materials, Inc.
0 cites
US11886120
2024
Deposition of Semiconductor Integration Films
Applied Materials, Inc.
0 cites
US11869807
2024
Fully Self-aligned Subtractive Etch
Applied Materials, Inc.
0 cites
US11621172
2023
Vapor Phase Thermal Etch Solutions for Metal Oxo Photoresists
Applied Materials, Inc.
0 cites
US11562904
2023
Deposition of Semiconductor Integration Films
Applied Materials, Inc.
0 cites