3 Patents
- US124216032025Composition for High Temperature Atomic Layer Deposition of High Quality Silicon Oxide Thin Films
Versum Materials US, LLC
0 cites - US122216922025Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites - US117133282023Stable Alkenyl or Alkynyl-containing Organosilicon Precursor Compositions
VERSUM MATERIALS US, LLC
0 cites