Maarten Hartger Kimman

3 Patents

• US125463792026

  Positioning System, a Lithographic Apparatus, a Driving Force Attenuation Method, and a Device Manufacturing Method

  ASML NETHERLANDS B.V.

  0 cites
• US118379312023

  Multiphase Linear Motor, Multiphase Planar Motor, Stage, Lithographic Apparatus and Device Manufacturing Method

  ASML Netherlands B.V.

  0 cites
• US116211422023

  Substrate Positioning Device and Electron Beam Inspection Tool

  ASML Netherlands B.V.

  0 cites