Patents/Inventors

Lutz Rebstock

GaienhofenDE9 patents

8 Patents

US125506672026
Method and System for Inspection of an Inner Pod or an Outer Pod of an EUV Pod
BROOKS AUTOMATION (GERMANY) GmbH
0 cites
US124614532025
EUV Reticle Stocker and Method of Operating the Same
BROOKS AUTOMATION (GERMANY) GmbH
0 cites
US122886972025
Core Module for Semiconductor Production Facility Machinery
Brooks Automation (Germany), GmbH
0 cites
US121486422024
Humidity Control in Semiconductor Systems
Brooks Automation (Germany) GmbH
0 cites
US120876032024
Inspection System
Brooks Automation (Germany) GmbH
0 cites
US119786522024
Automatic Handling Buffer for Bare Stocker
Brooks Automation (Germany) GmbH
0 cites
US118726032024
Method for Cleaning a Synthetic Surface
BROOKS AUTOMATION (GERMANY) GmbH
0 cites
US115878162023
Container Storage Add-on for Bare Workpiece Stocker
BROOKS AUTOMATION (GERMANY) GmbH
0 cites