Lukas Baumgartel

3 Patents

• US125776752026

  System and Method for Mass Flow Measurement and Control of Process Gases in a Carrier Stream Using One or More Quartz Crystal Microbalance Sensors

  Inficon, Inc.

  0 cites
• US120516982024

  Fabrication of Gate-all-around Integrated Circuit Structures Having Molybdenum Nitride Metal Gates and Gate Dielectrics with a Dipole Layer

  Intel Corporation

  0 cites
• US118698892024

  Self-aligned Gate Endcap (SAGE) Architectures Without Fin End Gap

  Intel Corporation

  0 cites