Patents/Inventors

Lisa J. Enman

Sunnyvale, CAUS5 patents

6 Patents

US123052752025
Corrosion Resistant Film on a Chamber Component and Methods of Depositing Thereof
Applied Materials, Inc.
0 cites
US119423302024
Methods for Selective Dry Etching Gallium Oxide
Applied Materials, Inc.
0 cites
US119329382024
Corrosion Resistant Film on a Chamber Component and Methods of Depositing Thereof
Applied Materials, Inc.
0 cites
US119329402024
Silyl Pseudohalides for Silicon Containing Films
APPLIED MATERIALS, Inc.
0 cites
US117323562023
Multilayer Encapsulation Stacks by Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US115812062023
Capacitive Sensor for Chamber Condition Monitoring
Applied Materials, Inc.
0 cites