Patents/Inventors

Liran Yerushalmi

Zicron YaacobIL11 patents

11 Patents

US123931132025
Inter-step Feedforward Process Control in the Manufacture of Semiconductor Devices
KLA CORPORATION
0 cites
US123477062025
Method for Measuring and Correcting Misregistration Between Layers in a Semiconductor Device, and Misregistration Targets Useful Therein
KLA-TENCOR CORPORATION
0 cites
US121319592024
Systems and Methods for Improved Metrology for Semiconductor Device Wafers
KLA Corporation
0 cites
US119716642024
Reducing Device Overlay Errors
KLA-TENCOR CORPORATION
0 cites
US118801422024
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US117840972023
Measurement of Overlay Error Using Device Inspection System
KLA-TENCOR CORPORATION
0 cites
US117094332023
Device-like Metrology Targets
Kla-tencor Corporation
0 cites
US116444192023
Measurement of Properties of Patterned Photoresist
KLA Corporation
0 cites
US116356822023
Systems and Methods for Feedforward Process Control in the Manufacture of Semiconductor Devices
KLA Corporation
0 cites
US116040632023
Self-calibrated Overlay Metrology Using a Skew Training Sample
KLA Corporation
0 cites
US116044202023
Self-calibrating Overlay Metrology
KLA Corporation
0 cites