15 Patents
- 0 cites
- 0 cites
- US123343112025Circuits for Edge Ring Control in Shaped Dc Pulsed Plasma Process Device
Applied Materials, Inc.
0 cites - US122550512025Multi-shape Voltage Pulse Trains for Uniformity and Etch Profile Tuning
Applied Materials, Inc.
0 cites - US122371482025Plasma Processing Assembly Using Pulsed-voltage and Radio-frequency Power
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US119487802024Automatic Electrostatic Chuck Bias Compensation During Plasma Processing
Applied Materials, Inc.
0 cites - US119086612024Apparatus and Methods for Manipulating Power at an Edge Ring in Plasma Process Device
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US117911382023Automatic Electrostatic Chuck Bias Compensation During Plasma Processing
Applied Materials, Inc.
0 cites - US117767892023Plasma Processing Assembly Using Pulsed-voltage and Radio-frequency Power
Applied Materials, Inc.
0 cites