Patents/Inventors

Lifu Li

MiyagiJP6 patents

6 Patents

US124826382025
Substrate Processing Apparatus and Shutter
TOKYO ELECTRON LIMITED
0 cites
US123879142025
Upper Electrode Assembly
TOKYO ELECTRON LIMITED
0 cites
US123082212025
Substrate Processing System and Method for Installing Edge Ring
Tokyo Electron Limited
0 cites
US122179422025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US121485982024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116768002023
Substrate Processing Apparatus and Control Method of Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites