Patents/Inventors

Liangfa Hu

Newark, CAUS5 patents

4 Patents

US125395302026
Throttle Valve and Foreline Cleaning Using a Microwave Source
Applied Materials, Inc.
0 cites
US123343842025
Methods and Apparatus for Minimizing Substrate Backside Damage
Applied Materials, Inc.
0 cites
US117568192023
Methods and Apparatus for Minimizing Substrate Backside Damage
APPLIED MATERIALS, Inc.
0 cites
US115606232023
Methods of Reducing Chamber Residues
Applied Materials, Inc.
0 cites