Li-shi Liu

3 Patents

• US124008382025

  Temperature-controlled Plasma Generation System

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US120209062024

  Grounding Cap Module and Gas Injection Device

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US115519112023

  Grounding Cap Module, Gas Injection Device and Etching Apparatus

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites