Patents/Inventors

Li-qun Xia

Cupertino, CAUS18 patents

16 Patents

US126159762026
Methods for Depositing Dielectric Films with Increased Stability
Applied Materials, Inc.
0 cites
US125000802025
Systems and Methods for Depositing Low-k Dielectric Films
Applied Materials, Inc.
0 cites
US124313612025
Self-aligned Double Patterning with Spatial Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US124105232025
Integrated Low K Recovery and ALD Metal Deposition Process for Advanced Technology Node
Applied Materials, Inc.
0 cites
US123621692025
Methods and Apparatus for Low Temperature Silicon Nitride Films
Applied Materials, Inc.
0 cites
US121256752024
RF Pulsing Assisted Low-k Film Deposition with High Mechanical Strength
Applied Materials, Inc.
0 cites
US121192232024
Single Precursor Low-k Film Deposition and UV Cure for Advanced Technology Node
Applied Materials, Inc.
0 cites
US121105892024
Methods for Metal Oxide Post-treatment
Applied Materials, Inc.
0 cites
US119903322024
Methods and Apparatus for Deposition of Low-k Films
Applied Materials, Inc.
0 cites
US119674982024
Systems and Methods for Depositing Low-k Dielectric Films
Applied Materials, Inc.
0 cites
US118878182024
Methods and Systems to Modulate Film Stress
Applied Materials, Inc.
0 cites
US118307282023
Methods for Seamless Gap Filling of Dielectric Material
APPLIED MATERIALS, Inc.
0 cites
US117106312023
Tensile Nitride Deposition Systems and Methods
Applied Materials, Inc.
0 cites
US116211622023
Systems and Methods for Forming Uv-cured Low-κ Dielectric Films
Applied Materials, Inc.
0 cites
US116004862023
Systems and Methods for Depositing Low-κdielectric Films
Applied Materials, Inc.
0 cites
US115726222023
Systems and Methods for Cleaning Low-k Deposition Chambers
Applied Materials, Inc.
0 cites