Patents/Inventors

Li-jui Chen

HsinchuTW119 patents

130 Patents

US125911822026
Lithography Contamination Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125720802026
Lithography System and Methods
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125608682026
System and Method for Omnidirectional Real Time Detection of Photolithography Characteristics
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125411522026
EUV Lithography System with 3D Sensing and Tunning Modules
TAIWAN SEMCONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125357272026
EUV Lithography Mask with a Porous Reflective Multilayer Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US125108272025
EUV Radiation Source Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125138092025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124875342025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124614542025
Semiconductor Processing Tool and Method of Using the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124497342025
Lithography Apparatus and Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124361642025
Particle Image Velocimetry of Extreme Ultraviolet Lithography Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124203132025
Onsite Cleaning System and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124227552025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124055292025
Lithography System and Methods
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124055412025
Methods of Servicing Photolithographic Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123994382025
Method and Apparatus for Removing Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123796752025
Extreme Ultraviolet Lithography System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123728782025
Inspection System for Extreme Ultraviolet (EUV) Light Source
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123728802025
System and Method for Detecting Debris in a Photolithography System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123728872025
Methods of Cleaning a Lithography System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123604582025
Radiation Collector
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123604642025
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123531422025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123479972025
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US123325712025
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122986722025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123024842025
Droplet Generator and Method of Servicing Extreme Ultraviolet Imaging Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122926952025
EUV Wafer Defect Improvement and Method of Collecting Nonconductive Particles
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122875722025
Lithography System and Methods
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122875892025
Method and Apparatus for Removing Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122822622025
Method for Controlling Extreme Ultraviolet Light
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122835122025
Semiconductor Processing Method and Apparatus
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122653362025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122355862025
EUV Photolithography System Fuel Source and Methods of Operating the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122355932025
System and Method for Dynamically Controlling Temperature of Thermostatic Reticles
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122355942025
Method for Performing Lithography Process, Light Source, and EUV Lithography System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122288632025
EUV Light Source Contamination Monitoring System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122164132025
Device and Method to Remove Debris from an Extreme Ultraviolet (EUV) Lithography System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122102952025
Reticle Cleaning Device and Method of Use
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122102962025
Method of Cleaning Wafer Table of Photolithography System and Method of Manufacturing Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122073812025
Extreme Ultraviolet Lithography System with Heated Tin Vane Bucket Having a Heated Cover
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121892982025
EUV Vessel Perimeter Flow Auto Adjustment
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121893112025
Reticle Carrier and Associated Methods
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121931362025
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121745452024
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121642352024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121675252024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121675262024
Method and System for Generating Droplets for EUV Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121587012024
Particle Removal Device and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121305552024
Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121305562024
Plasma Position Control for Extreme Ultraviolet Lithography Light Sources
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121333192024
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121191292024
EUV Lithography Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121115822024
Substrate Stage and Substrate Processing System Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121115832024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121144122024
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120965432024
Method for Using Radiation Source Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120965442024
Lithography Thermal Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120855852024
Particle Image Velocimetry of Extreme Ultraviolet Lithography Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120858602024
System and Method for Monitoring and Controlling Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120858652024
System and Method for Detecting Debris in a Photolithography System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120789332024
System and Method for Omnidirectional Real Time Detection of Photolithography Characteristics
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120667612024
Inspection Tool for an Extreme Ultraviolet Radiation Source to Observe Tin Residual
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120614232024
Method and Apparatus for Mitigating Tin Debris
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120637342024
Droplet Generator Assembly and Method of Replacing Components
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120558642024
Droplet Generator and Method of Servicing a Photolithographic Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120558652024
Extreme Ultraviolet Lithography System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120558672024
Lithography Contamination Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120503992024
Pellicle Assembly and Method of Making Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120449752024
Extreme Ultraviolet Control System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120323032024
EUV Wafer Defect Improvement and Method of Collecting Nonconductive Particles
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120259182024
Method for Lithography in Semiconductor Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120289592024
EUV Light Source and Apparatus for EUV Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120193782024
Methods of Cleaning a Lithography System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120076942024
Lithography Apparatus and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120091772024
Detection Using Semiconductor Detector
NATIONAL TSING HUA UNIVERSITY
0 cites
US119977782024
Replacement and Refill Method for Droplet Generator
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119829442024
Method of Lithography Process and Transferring a Reticle
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119799712024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119733022024
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119538392024
Highly Efficient Automatic Particle Cleaner Method for EUV Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119487022024
Radiation Source Apparatus and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119069022024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118605442024
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118529782023
EUV Lithography System with 3D Sensing and Tunning Modules
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118416252023
Device and Method to Remove Debris from an Extreme Ultraviolet (EUV) Lithography System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118290822023
Radiation Source for Lithography Process
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118307542023
Semiconductor Processing Method and Apparatus
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118323722023
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118222562023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118090752023
EUV Lithography Mask with a Porous Reflective Multilayer Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118090832023
EUV Photolithography System Fuel Source and Methods of Operating the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118090872023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118031292023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118006262023
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117929092023
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117823502023
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117684372023
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117477352023
EUV Vessel Perimeter Flow Auto Adjustment
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117477412023
Substrate Stage, Substrate Processing System Using the Same, and Method for Processing Substrate
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117372002023
Residual Gain Monitoring and Reduction for EUV Drive Laser
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd
0 cites
US117231412023
EUV Radiation Generation Methods and Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117037632023
Method of Lithography Process Using Reticle Container with Discharging Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117037692023
Light Source, EUV Lithography System, and Method for Performing Circuit Layout Patterning Process
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116985912023
System and Method of Discharging an EUV Mask
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116933242023
System and Method for Detecting Debris in a Photolithography System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116933262023
System and Method for Dynamically Controlling Temperature of Thermostatic Reticles
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116948202023
Radiation Source Apparatus and Method for Using the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116870112023
Reticle Carrier and Associated Methods
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116809582023
Particle Image Velocimetry of Extreme Ultraviolet Lithography Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116812342023
Mask for Attracting Charged Particles and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116752722023
Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116626682023
Lithography Contamination Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116574922023
Reticle Backside Inspection Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116505082023
Plasma Position Control for Extreme Ultraviolet Lithography Light Sources
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116505122023
Reticle Cleaning Device and Method of Use
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116447592023
Droplet Generator and Method of Servicing Extreme Ultraviolet Radiation Source Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116475782023
Lithography Thermal Control
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116303932023
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116328492023
Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116172552023
Droplet Generator and Method of Servicing Extreme Ultraviolet Imaging Tool
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116054772023
EUV Lithography Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115990302023
Droplet Catcher, Droplet Catcher System of EUV Lithography Apparatus, and Maintenance Method of the EUV Lithography Apparatus
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US115945282023
Layout Modification Method for Exposure Manufacturing Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115882932023
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115762502023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US115674152023
Inspection System for Extreme Ultraviolet (EUV) Light Source
Taiwan Semiconductor Manufacturing Company Ltd.
0 cites
US115560652023
Wafer Stage and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115502282023
System and Apparatus for Lithography in Semiconductor Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115535812023
Radiation Source Apparatus and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites