5 Patents
- 0 cites
- US118759702024Radio Frequency Electrode Assembly for Plasma Processing Apparatus, and Plasma Processing Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US116825412023Radio Frequency Power Supply System, Plasma Processor, and Frequency-tuning Matching
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US116263142023Lift Pin Assembly, an Electrostatic Chuck and a Processing Apparatus Where the Electrostatic Chuck Is Located
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - 0 cites