Leonard Wai Fung Kho

4 Patents

• US125312102026

  Edge Exclusion Control

  Lam Research Corporation

  0 cites
• US124761432025

  Backside Reactive Inhibition Gas

  Lam Research Corporation

  0 cites
• US122278372025

  Ex Situ Coating of Chamber Components for Semiconductor Processing

  Lam Research Corporation

  0 cites
• US121632192024

  Ex Situ Coating of Chamber Components for Semiconductor Processing

  Lam Research Corporation

  0 cites