Patents/Inventors

Leigh F Sharrock

Londonderry, NHUS3 patents

3 Patents

US125449082026
Substrate Transport Apparatus with Independent Accessory Feedthrough
BROOKS AUTOMATION US, LLC
0 cites
US117640932023
Automatic Wafer Centering Method and Apparatus
Brooks Automation US, LLC
0 cites
US116642592023
Process Apparatus with On-the-fly Substrate Centering
Brooks Automation US, LLC
0 cites