Patents/Inventors

Lee Chen

Cedar Creek, TXUS4 patents

4 Patents

US125818752026
Processing Tool Capable for Forming Carbon Layers on Substrates
LAM RESEARCH CORPORATION
0 cites
US122834622025
Control of Plasma Formation by RF Coupling Structures
Lam Research Corporation
0 cites
US121988962025
Compact High Density Plasma Source
Lam Research Corporation
0 cites
US117281352023
Electric Pressure Systems for Control of Plasma Properties and Uniformity
TOKYO ELECTRON LIMITED
0 cites