Patents/Inventors

Lauren Wilson

San Jose, CAUS2 patents

3 Patents

US118796832024
Self-aligning Vacuum Feed-through for Liquid Nitrogen
KLA Corporation
0 cites
US116357002023
Method and Apparatus for EUV Mask Inspection
0 cites
US116172562023
Laser and Drum Control for Continuous Generation of Broadband Light
KLA Corporation
0 cites