40 Patents
- 0 cites
- US125686512026Semiconductor Structure Having Stacked Gates and Method of Manufacture Thereof
Tokyo Electron Limited
0 cites - US125573772026Inverted Cross-couple for Top-tier FET for Multi-tier Gate-on-gate 3DI
Tokyo Electron Limited
0 cites - 0 cites
- US124462912025Inverted Top-tier FET for Multi-tier Gate-on-gate 3-dimension Integration (3di)
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- 0 cites
- US123362742025Self-aligned Method for Vertical Recess for 3D Device Integration
Tokyo Electron Limited
0 cites - 0 cites
- 0 cites
- US122180662025Monolithic Formation of a Set of Interconnects Below Active Devices
Tokyo Electron Limited
0 cites - 0 cites
- US121762932024Inter-tier Power Delivery Network (PDN) for Dense Gate-on-gate 3D Logic Integration
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- US120876402024High Density Logic Formation Using Multi-dimensional Laser Annealing
Tokyo Electron Limited
0 cites - 0 cites
- 0 cites
- US120209902024Method for Threshold Voltage Tuning Through Selective Deposition of High-k Metal Gate (HKMG) Film Stacks
Tokyo Electron Limited
0 cites - US120149842024Method of Manufacturing a Semiconductor Apparatus Having Stacked Devices
Tokyo Electron Limited
0 cites - 0 cites
- US119618022024Power-tap Pass-through to Connect a Buried Power Rail to Front-side Power Distribution Network
Tokyo Electron Limited
0 cites - 0 cites
- US119013602024Architecture Design and Process for Manufacturing Monolithically Integrated 3D CMOS Logic and Memory
Tokyo Electron Limited
0 cites - US118308522023Multi-tier Backside Power Delivery Network for Dense Gate-on-gate 3D Logic
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- US117912712023Monolithic Formation of a Set of Interconnects Below Active Devices
Tokyo Electron Limited
0 cites - US117641132023Method of 3D Logic Fabrication to Sequentially Decrease Processing Temperature and Maintain Material Thermal Thresholds
Tokyo Electron Limited
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US116463182023Connections from Buried Interconnects to Device Terminals in Multiple Stacked Devices Structures
Tokyo Electron Limited
0 cites - US1163167120233D Complementary Metal Oxide Semiconductor (CMOS) Device and Method of Forming the Same
Tokyo Electron Limited
0 cites - 0 cites
- 0 cites
- US115748452023Apparatus and Method for Simultaneous Formation of Diffusion Break, Gate Cut, and Independent N and P Gates for 3D Transistor Devices
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- 0 cites