Patents/Inventors

Kyungsik Kang

Bucheon-siKR2 patents

3 Patents

US118289522023
Light Source and Extreme Ultraviolet Light Source System Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117787192023
Laser Beam Delivery Apparatus for Extreme Ultra Violet Light Source
Samsung Electronics Co., Ltd.
0 cites
US116762632023
Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites