Kyoungwhan Oh

7 Patents

• US126079442026

  Extreme Ultraviolet Source Cleaning Apparatus, EUV Source Cleaning Method Using the Same, and Substrate Processing Method Including the Same

  SAMSUNG ELECTRONICS CO., Ltd.

  0 cites
• US125557442026

  Plasma Process Apparatus

  SAMSUNG ELECTRONICS CO., Ltd.

  0 cites
• US125326992026

  Photoresist Coating Apparatus

  SAMSUNG ELECTRONICS CO., Ltd.

  0 cites
• US124725412025

  Apparatus for Cleaning a Bowl and a Photoresist (PR) Coating System Including the Same

  SAMSUNG ELECTRONICS CO., Ltd.

  0 cites
• US124555102025

  Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same

  Seoul National University R&DB Foundation

  0 cites
• US124555132025

  Chemical Liquid Circulation Apparatus, Chemical Liquid Dispensing Apparatus, and Chemical Liquid Supply System Having the Same

  Samsung Electronics Co., Ltd.

  0 cites
• US120709032024

  3D Printing Apparatus and 3D Printing Method

  Samsung Electronics Co., Ltd.

  0 cites