11 Patents
- 0 cites
- 0 cites
- 0 cites
- US122472862025Heater Assembly Including Cooling Apparatus and Method of Using Same
ASM IP Holding B.V.
0 cites - US121632252024Temperature-controlled Chemical Delivery System and Reactor System Including Same
ASM IP Holding B.V.
0 cites - US119763592024Gas Supply Assembly, Components Thereof, and Reactor System Including Same
ASM IP Holding B.V.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- US116263132023Apparatus and Methods for Isolating a Reaction Chamber from a Loading Chamber Resulting in Reduced Contamination
ASM IP HOLDING B.V.
0 cites