4 Patents
- US124943522025Plasma Confinement Ring, Semiconductor Manufacturing Apparatus Including the Same, and Method of Manufacturing a Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US121835552024Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US118697512024Upper Electrode and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US115453442023Upper Electrode and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites