3 Patents
- US125354332026Focus Control Method for Spectroscopic Measuring Apparatus, Inspection Method for Semiconductor Device, and Spectroscopic Measuring Apparatus for Performing the Same
Samsung Electronics Co., Ltd.
0 cites - US122050402025Method of Training Deep Learning Model for Predicting Pattern Characteristics and Method of Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - 0 cites